Diffraction gratings in sol–gel films by direct contact printing using a UV-mercury lamp
نویسندگان
چکیده
We report on the fabrication of diffraction gratings in photosensitive sol–gel thin films by direct contact printing using a UV-mercury lamp. Titanium amplitude masks were used to replicate diffraction gratings into photosensitive sol–gel films by contact printing with an incoherent UV-light source. Gratings with 1-mm period were fabricated in sol–gel films. The diffraction efficiencies of each diffracted order were measured and compared to theoretical values. The demonstrated process of contact printing using a regular UV-light source in the optically compatible sol–gel material has potential for large-scale fabrication of submicrometer gratings at very low cost. q 1999 Elsevier Science B.V. All rights reserved. PACS: 42.82.Cr; 42.79.Dj; 81.20.Fw
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